High density Al2O3/TaN-based metal--insulator-- metal capacitors in application to radio frequency integrated circuits |
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Authors: | Ding Shi-Jin Huang Yu-Jian Huang Yue Pan Shao-Hui Zhang Wei and Wang Li-Kang |
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Institution: | State Key Laboratory of ASIC and System, Department of Microelectronics, Fudan University, Shanghai 200433, China |
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Abstract: | Metal--insulator--metal (MIM) capacitors with atomic-layer-deposited
Al$_{2}$O$_{3}$ dielectric and reactively sputtered TaN electrodes in
application to radio frequency integrated circuits have been
characterized electrically. The capacitors exhibit a high density of
about 6.05\,fF/$\mu $m$^{2}$, a small leakage current of $4.8\times
10^{-8}$\,A/cm$^{2}$ at 3\,V, a high breakdown electric field of
8.61\,MV/cm as well as acceptable voltage coefficients of capacitance
(VCCs) of 795\,ppm/V$^{2}$ and 268\,ppm/V at 1\,MHz. The observed
properties should be attributed to high-quality Al$_{2}$O$_{3}$ film
and chemically stable TaN electrodes. Further, a logarithmically
linear relationship between quadratic VCC and frequency is observed
due to the change of relaxation time with carrier mobility in the
dielectric. The conduction mechanism in the high field ranges is
dominated by the Poole--Frenkel emission, and the leakage current in
the low field ranges is likely to be associated with trap-assisted
tunnelling. Meanwhile, the Al$_{2}$O$_{3}$ dielectric presents charge
trapping under low voltage stresses, and defect generation under high
voltage stresses, and it has a hard-breakdown performance. |
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Keywords: | metal--insulator--metal atomic-layer-deposition Al_{2}O_{3} radio frequency integrated
circuit |
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