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Laser Assisted Patterning of a‐Si:H: Detailed Investigation of Laser Damage |
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| Authors: | Menglei Xu Twan Bearda Hariharsudan S Radhakrishnan Miha Filipi? Ivan Gordon Maarten Debucquoy Jozef Szlufcik Jef Poortmans |
| Institution: | 1. Imec, 3001 Heverlee, Belgium;2. KU Leuven, Kasteelpark Arenberg 10, B‐3001 Heverlee, Belgium;3. Hasselt University, Hasselt 3500, Belgium |
| Abstract: | |
| Keywords: | amorphous silicon heterojunctions laser ablation passivation patterning silicon |