| 一种新型MEMS电磁继电器的研究 |
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| 引用本文： | 刘亮, 赵小林, 戴旭涵, 鲁李乐, 丁桂甫.一种新型MEMS电磁继电器的研究[J].电子器件,2008,31(5). |
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| 作者姓名： | 刘亮 赵小林 戴旭涵 鲁李乐 丁桂甫 |
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| 作者单位： | 上海交通大学微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海,200030 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划)，上海市科委重点实验室基金，微米/纳米加工技术国家级重点实验室基金 |
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| 摘 要： | 介绍了一种MEMS电磁驱动微继电器,这种继电器体积小、易于集成.它采用双层1 mm×1 mm平面线圈和吸合式坡莫合金悬臂梁结构,层间用聚酰亚胺作绝缘材料.文中介绍了器件的工作原理,建立了磁路的仿真模型,据此计算确定了气隙宽度和悬臂梁厚度.采用表面微加工和微电铸工艺制作了器件.
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| 关 键 词： | 微机电系统(MEMS) 电磁驱动 微继电器 微电铸 |
Research of a New Type MEMS Electromagnetic Relay |
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| LIU Liang,ZHAO Xiao-lin,DAI Xu-han,LU Li-le,DING Gui-fu National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film andMicrofabrication of Education Ministry,Shanghai Jiaotong University,Shanghai,China.Research of a New Type MEMS Electromagnetic Relay[J].Journal of Electron Devices,2008,31(5). |
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| Authors: | LIU Liang ZHAO Xiao-lin DAI Xu-han LU Li-le DING Gui-fu National Key Laboratory of Nano/Micro Fabrication Technology Key Laboratory for Thin Film andMicrofabrication of Education Ministry Shanghai Jiaotong University Shanghai China |
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| Institution: | LIU Liang,ZHAO Xiao-lin,DAI Xu-han,LU Li-le,DING Gui-fu National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film ,Microfabrication of Education Ministry,Shanghai Jiaotong University,Shanghai 200030,China |
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| Abstract: | This paper introduces a MEMS electromagnetic relay with small volume and easy integration.This relay includes two layers of 1 mm×1 mm planar Cu coils,permalloy cantilever,and polyimide insulation layer.The working principle is introduced.Simulation has been performed to decide the gap width and cantilever thickness.The surface micromachining and microelectroplating method is used to fabricate the relay. |
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| Keywords: | MEMS Electromagnetic Actuator Micro Relay Microelectroplating |
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