| 硅微结构惯性传感器的研制现状及应用前景 |
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| 引用本文： | 许国祯.硅微结构惯性传感器的研制现状及应用前景[J].中国惯性技术学报,1998(1). |
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| 作者姓名： | 许国祯 |
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| 作者单位： | 中国航空信息中心研究部 |
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| 摘 要： | 本文从介绍硅微结构惯性传感器的研制背景入手，分析了微米／纳米技术近年来的进展对发展硅微传感器的推动作用，重点介绍了美国主要公司有关硅微结构惯性仪表的研制现状，最后结合市场预测，提出笔者对我国发展硅微惯性传感器的几点浅见。
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| 关 键 词： | 惯性仪表 微米／纳米技术 微电子机械加工技术 |
Development and Application on Sillicon Micromachined Inertial Sensors |
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| Xu Guozhen.Development and Application on Sillicon Micromachined Inertial Sensors[J].Journal of Chinese Inertial Technology,1998(1). |
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| Authors: | Xu Guozhen |
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| Institution: | China AeroInformation Center |
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| Abstract: | This paper introduces simply the research background of the sillicon micromachined inertial sensors and analyzes the existing effect on it through important progress in the micro/nano technology. The paper gives emphasis on the latest development results on the sillicon micromachined inertial sensor in U.S.A. and the market prospect for this new type sensor.Lastly, the author offers several proposals for developing the sillicon micromachined inertial sensors in China to the end of this paper. |
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| Keywords: | inertial sensor micro/nano technology MEMT(Micro Electro Mechannical Technology) |
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