二次阳极氧化方法制备有序多孔氧化铝膜

通过二次阳极氧化方法制备多孔氧化铝膜与一次阳极氧化方法制备多孔氧化铝膜孔排布规律性的对比,结果发现,二次阳极氧化方法制取的多孔氧化铝膜孔排布规律性明显好于一次阳极氧化法制取的多孔膜.在几个微米范围内,孔呈理想的六角排布.去除一次阳极氧化膜后,二次阳极氧化得以在更良好的表面进行,制取的氧化铝膜孔规律性和有序度更高.有序区域的尺寸与晶粒内的亚晶大小有一定关系.

Study of Ordered Porous Alumina Membrane Made by Two-step Anodization

Porous alumina membrane is prepared by aluminum anodizing in given acidic solution. Now porous alumina membrane is a type of the famous template for fabricating nano-structural materials. The method of two-step anodic oxidation improves the regularity of porous distribution greatly. For optimizing nano-structured assembling system, highly ordered porous alumina template is desirable. The cause of ordered porous aluminamembrane made by two-step anodic oxidation has been investigated. The regularity of holes arrangement in the membrane made by two-step anodic oxidation displayed better than that of the membrane anodizing only once from experimental results. The long-range ordered scope reaches 3~4μm. However, the ordered scope of holes arrangement in two-step membrane is limited in several micrometers and difficult to improve. In order to raise the order degree, aluminum was annealed to increase the grain size. The result showed that annealing had no contribution to holes ordering. In fact, the sub-grain size of aluminum decides the dimension of ordered scope.