Influence of deposition parameters on hard Cr-Al-N coatings deposited by multi-arc ion plating

The Cr-Al-N coatings were synthesized at various substrate bias voltages and nitrogen partial pressures by multi-arc ion plating (M-AIP). The relationships between deposition parameters and coating properties were investigated. Morphologies, phase structures, hardness and adhesion strength of the coatings were analyzed by SEM, XRD, XPS, nano-indenter and scratch tester. The results indicated that with the increase of substrate bias voltages, the surface macroparticles and deposition rate reduced mainly for the resputtering phenomenon. The (Cr, Al)N solid-solution phase kept unchanged, but the Cr₂N and AlN phases disappeared gradually. Due to the change of phase structures and residual compressive stress, the hardness values decreased and the adhesion strength decreased initially and then increased. Similarly, with the increase of nitrogen partial pressures, the phase structures of CrAlN coatings varied from Cr + Cr₂N + (Cr,Al)N to Cr₂N + (Cr,Al)N. The surface macroparticles increased due to the decreasing resputtering efficiency, and the deposition rate increased initially and then decreased due to the resputtering phenomenon. With increasing nitrogen partial pressures, adhesion strength decreased initially and then increased. The microhardness increased mainly due to the increase of Cr₂N contents and decrease of metal macroparticles.