Microwave excitation and readout of nano- and micron scale cantilevers |
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Authors: | Ling Hao Stefan Goniszewski Jie ChenJohn Gallop |
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Institution: | a National Physical Laboratory, Hampton Rd., Teddington TW11 0LW,, UK b Royal Holloway University of London, Egham, TW20 9PP, , UK c Brunel University, Uxbridge, UB8 3PH, , UK |
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Abstract: | We show that a microwave near-field coaxial resonator system allows mechanical cantilever excitation on a scale much shorter than the microwave wavelength. Thermal noise is observed in the unexcited system, enabling room temperature displacement sensitivity of ∼70 fm/Hz1/2. The measured force between near-field probe and cantilever varies with separation, in excellent agreement with theory. Uniquely, optical excitation and read-out lasers are also included. The dependence of mechanical resonator quality factor on ambient air pressure has been accurately measured. We have demonstrate passive cantilever mode cooling from 300 K to 80 K by frequency detuning the microwave resonator and propose pulsed cooling operation to enable several high-sensitivity applications. |
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Keywords: | Near-field microwave microscope Cantilever MEMS NEMS |
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