| 软X-射线滤光片支撑镍网的设计及制作工艺研究 |
| |
| 引用本文： | 伍志军,李加东,张贵彦,缪同群.软X-射线滤光片支撑镍网的设计及制作工艺研究[J].压电与声光,2010,32(2). |
| |
| 作者姓名： | 伍志军 李加东 张贵彦 缪同群 |
| |
| 作者单位： | 1. 中国科学院,长春光学精密机械与物理研究所,吉林,长春,130033;中国科学院,研究生院,北京,100039
2. 中国科学院,长春光学精密机械与物理研究所,吉林,长春,130033 |
| |
| 摘 要： | 介绍了软X-射线滤光片支撑栅网的工作原理及其制作工艺,以金属镍为结构材料,采用了微机电系统(MEMS)技术中的电镀工艺及剥离工艺,讨论了制作工艺中的难点,最后成功制作了网面平整、网线匀称、表面光亮、应力小、厚度均匀的镍网,该镍网厚14 μm,栅线间隔36.3 μm,透过率80%.
|
| 关 键 词： | X-射线光学 滤光片 电铸镍网 太阳X-射线成像望远镜 |
Design and Fabrication Process of Electroformed Nickel Mesh for Soft X-ray Filter |
| |
| WU Zhijun,LI Jiadong,ZHANG Guiyan,MIAO Tongqun.Design and Fabrication Process of Electroformed Nickel Mesh for Soft X-ray Filter[J].Piezoelectrics & Acoustooptics,2010,32(2). |
| |
| Authors: | WU Zhijun LI Jiadong ZHANG Guiyan MIAO Tongqun |
| |
| Abstract: | The theory and fabrication process of support mesh for soft X-ray filter is introduced. The mesh is fabricated with nickel, using the electroplating process and lift-off process in MEMS technology, and the fabrication difficulty is discussed in detail as well. The electroformed nickel mesh with smooth surface, low stress and coincident thickness has been fabricated. The nickel mesh has the size of the thickness of 14 μm, line interval of 36.3 μm and the transmittance of 80%. |
| |
| Keywords: | X-ray optics filter electroformed nickel mesh solar X-ray telescope |
| 本文献已被 万方数据 等数据库收录！ |
|
