超精密气浮轴承垂直方向的动力学分析

针对超精密气浮轴承垂直方向的动态特性易受多种因素的影响,且各影响因素有极强的耦合性的特点,运用纳维-斯托克斯方程和牛顿力学方程建立了气浮轴承的动力学解析模型,通过求解该模型,研究了系统惯性项、对流项和几何项对系统动力学特性的影响机理,导出了在惯性项为扰动张量下的系统稳定性方程,获得了一维气浮轴承全动力学的解析渐近结果.仿真结果表明,所建立的解析模型正确地反映了超精密气浮轴承的动力学特性,得出的解析结果与仿真结果是一致的.

Dynamics analysis of air bearing with ultra-precision in vertical direction

The dynamics characteristics of air bearing with ultra-precision in vertical motion are affected by the supplying pressure and the influential factors possessed of strong coupling. Thus, a dynamic analytical model for air bearing was established by Navier - Stokes equations and Newton equation. By solving this model, the influential factors such as the inertia factor of the bearing, the convective item of the air flow and the geometric factor on the characteristics of system dynamics were studied. The stable equation on the air bearing in vertical direction was derived. The analytic asymptotical results of the full dynamics of one-dimensional air bearing were obtained. Simulation result showed the established model reflected the dynamics characteristics of the air bearing with ultra-precision and the analytic results were in consistent with the simulation ones.