| 微压电式振动能量采集器的研究进展 |
| |
| 引用本文： | 孙健,李以贵,刘景全,杨春生,何丹农.微压电式振动能量采集器的研究进展[J].微纳电子技术,2009,46(11). |
| |
| 作者姓名： | 孙健 李以贵 刘景全 杨春生 何丹农 |
| |
| 作者单位： | 1. 上海交通大学,微纳科学技术研究院,薄膜与微细技术教育部重点实验室,微米/纳米加工技术国家级重点实验室,上海,200210
2. 纳米技术及应用国家工程研究中心,上海,200241 |
| |
| 基金项目： | 国家自然科学基金资助项目，航空重点实验室基金资助项目，科技部国际合作项目，上海市科委资助项目 |
| |
| 摘 要： | 给出了微压电式振动能量采集器的基本工作原理和物理模型。按照压电单元结构类型的不同,将其分为单一的直线型悬臂梁、直线型悬臂梁阵列、L型悬臂梁和圆形压电膜,分别讨论了各种类型的微压电振动能量采集器的优缺点。详细介绍了国内外各研究小组研制的微压电式振动能量采集器的结构参数、性能及其应用现状,分析针对目前研究中存在的问题,指出如果能在分析建模、压电结构及压电材料优化方面取得实质性进展,微压电振动能量采集器作为新型供能设备在MEMS系统和低功耗无线传感网络中的应用将会具有更加诱人的前景。
|
| 关 键 词： | 微机电系统 压电式 能量采集器 悬臂梁 压电膜 |
Trends of MEMS-Based Piezoelectric Vibration Energy Harvesters |
| |
| Sun Jian,Li Yigui,Liu Jingquan,Yang Chunsheng,He Dannon.Trends of MEMS-Based Piezoelectric Vibration Energy Harvesters[J].Micronanoelectronic Technology,2009,46(11). |
| |
| Authors: | Sun Jian Li Yigui Liu Jingquan Yang Chunsheng He Dannon |
| |
| Abstract: | The working principle and physical model of MEMS-based piezoelectric vibration energy harvesters (MPVEHs) are described.According to different structures of piezoelectric components,MPVEHs can be divided into four types which are single linear cantilever structure,linear cantilever array,L-shape beam-mass structure and circular piezoelectric diaphragm structure.Advantages and disadvantages of different MPVEHs are discussed.The structure parameters and performance of the MPVEHs made by research teams at home and abroad are introduced in detail.The achievements and applications of MPVEHs are pointed out,and the problems in the current research are analyzed.If great progress in analysis and modeling,structures and piezoelectric materials can be made,MPVEHs as novel energy equipments will have a promise future in MEMS systems and low-power wireless sensor networks. |
| |
| Keywords: | microeletromechanical systems piezoelectric vibration type energy harvester cantilever piezoelectric diaphragm |
| 本文献已被 万方数据 等数据库收录！ |
|
