| 氟化钙晶体生长的研究进展 |
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| 引用本文： | 苏良碧,杨卫桥,董永军,周圣明,周国清,徐军.氟化钙晶体生长的研究进展[J].人工晶体学报,2003,32(5):476-482. |
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| 作者姓名： | 苏良碧 杨卫桥 董永军 周圣明 周国清 徐军 |
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| 作者单位： | 中国科学院上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 随着深紫外光刻技术的发展,透光范围宽、透过率高的CaF2晶体成了人们关注的焦点,其尺寸和质量得到了不断的提高.结合CaF2的基本性质,综述了CaF2晶体的主要生长方法及存在的问题.从原料的纯化处理到晶体的光学加工,归纳总结了提高紫外级CaF2晶体的尺寸、质量和产率的有效措施.
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| 关 键 词： | 氟化钙(CaF2)晶体 紫外光刻 晶体生长 |
| 文章编号： | 1000-985X(2003)05-0476-07 |
| 修稿时间： | 2003年4月7日 |
Research and Progress of CaF2 Crystal Growth |
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| SU Liang-bi,YANG Wei-qiao,DONG Yong-jun,ZHOU Sheng-ming,ZHOU Guo-qing,XU Jun.Research and Progress of CaF2 Crystal Growth[J].Journal of Synthetic Crystals,2003,32(5):476-482. |
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| Authors: | SU Liang-bi YANG Wei-qiao DONG Yong-jun ZHOU Sheng-ming ZHOU Guo-qing XU Jun |
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| Abstract: | CaF2 crystal with broad wavelength range and high transmittance has become the focus of the semiconductor industry with the development of UV-lithography. Therefore, the size and quality of CaF2 crystal have gained continuous enhancement. Combined with the fundamental properties of CaF2, the main CaF2 crystal growth methods and existing problems were summarized. Those effective ways of improving the size, quality and rate of production of UV-graded CaF2 crystal were introduced from the purification of raw materials to the surface finish of crystal. |
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| Keywords: | calcium fluoride (CaF2) crystal UV-lithography crystal growth |
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