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Nanostructured silicon surfaces via nanoporous alumina |
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| Authors: | Kruse Matthias Franzka Steffen Schmid Günter |
| Affiliation: | Institut für Anorganische Chemie, Universit?t Essen, Universit?tsstr. 5-7, 45117 Essen, Germany. |
| Abstract: | Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching (RIE). |
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