| 微机电系统磨损特性研究进展 |
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| 引用本文： | 张文明,孟光.微机电系统磨损特性研究进展[J].摩擦学学报,2005,25(5):489-494. |
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| 作者姓名： | 张文明 孟光 |
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| 作者单位： | 上海交通大学,振动、冲击、噪声国家重点实验室,上海,200030;上海交通大学,振动、冲击、噪声国家重点实验室,上海,200030 |
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| 摘 要： | 对微机电系统,尤其是微旋转机械的磨损研究现状进行评述,介绍MEMS及微旋转机械中的各种磨损问题,分析材料和不同工况(表面粗糙度、环境以及载荷)等条件对MEMS及微旋转机械磨损性能的影响,介绍不同形式的磨损模型、分析方法与检测仪器,并对相关领域的研究进展进行展望.
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| 关 键 词： | 微机电系统(MEMS) 磨损性能 表面改性 |
| 文章编号： | 1004-0595（2005）-05-0489-06 |
| 收稿时间： | 2004-11-26 |
| 修稿时间： | 2005-03-17 |
Progress of Wear Properties on Micro-Electro-Mechanical Systems |
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| ZHANG Wen-ming,MENG Guang.Progress of Wear Properties on Micro-Electro-Mechanical Systems[J].Tribology,2005,25(5):489-494. |
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| Authors: | ZHANG Wen-ming MENG Guang |
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| Institution: | State Key Laboratory of Vibration, Shock and Noise, Shanghai Jiao Tong University, Shanghai 200030, China |
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| Abstract: | Current state and progress of studies of wear on micro-electro-mechanical systems (MEMS), particular in micro rotating machines, are summarized in detail. Various wear behavior of MEMS and micro rotating machines are introduced and effects of material properties, roughness, environments, loadings and working conditions on wear are briefed. Many kinds of wear models, analysis methods, testing method and experiment instruments are discussed. Furthermore, prospect is also provided concerning further work in MEMS and micro rotating machines. |
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| Keywords: | MEMS wear behavior surface modification |
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