Imaging properties and applications of scanning optical microscopes |
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| Authors: | T Wilson |
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| Institution: | (1) Department of Engineering Science, University of Oxford, Parks Road, Oxford, UK |
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| Abstract: | This review paper is concerned with the imaging properties and major uses of scanning optical microscopes. It is shown that
the confocal scanning microscope exhibits a form of super-resolution and that the instrument in general has great application
in nonlinear microscopy and the inspection of electronic devices. |
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| Keywords: | 42 30 42 80 72 40 |
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