小孔阵列式太阳敏感器的光学系统设计

微型数字式太阳敏感器光学系统由APS CMOS图像传感器和基于MEMS工艺的小孔阵列式光线引入器组成。图像传感器的分辨率为1024×1024pixel,像素尺寸为10μm×10μm;光线引入器具有微小孔阵列结构,小孔为方形孔,30×30阵列,尺寸为60μm×60μm,间距为250μm。光线引入器采用了MEMS工艺的掩模板制备工艺。针对所设计的光学系统计算了曝光时间,并在此基础上进行了地面成像实验。实验结果表明,光学系统设计合理,保证了敏感器所具有的高精度和大视场。

Optical system design for a micro digital sun sensor

The optical system of the micro digital sun sensor consists of APS CMOS image sensor and MEMS based diaphragm with pinhole array structure. The resolution of the image sensor is 1024×1024pixel,and the pixel size of the sensor is 10μm×10μm. The diaphragm has a structure of pinhole array. The pin is square shape,the array is 30×30,the size of a pin is 60μm×60μm,the distance between two pins is 250μm. The diaphragm was made with mask plate technology of MEMS. The exposure time was calculated out for the optical system. The ground imaging experiments were carried out. The results show that the optical system is designed well,and the sensor have characters of high accuracy and wide field of view.