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A monolithically integrated CMOS labchip using sensor devices
Authors:H. Schä  fer,L. Schö  ler,K. Seibel,M. Bö  hm
Affiliation:Institute for Microsystem Technologies, University of Siegen, Siegen 57068, Germany
Abstract:A new concept for a monolithic labchip platform to combine standard CMOS-integrated circuit technology and novel solid-state components is presented. The capability to perform laboratory analysis operations on small-scale labchip devices holds exceptional advantages compared to commonly used diagnostic instrumentation. The objective is to improve cost-efficiency, performance and functionality of chemical or biological systems on-a-chip by increasing the level of integration and miniaturization. The integration of hydrogenated amorphous silicon color sensors enables a novel combinatoric labchip-based chemical verification method in a specifically arranged microarray of capillaries and sensors. To test the labchip functionality, results about an electrophoretic separation as well as a pH-sensitive luminescent sensor complex are shown.
Keywords:Labchip   Monolithic integration   Microfluidic   a-Si:H sensors   Electrophoretic separation
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