A monolithically integrated CMOS labchip using sensor devices |
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Authors: | H. Schä fer,L. Schö ler,K. Seibel,M. Bö hm |
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Affiliation: | Institute for Microsystem Technologies, University of Siegen, Siegen 57068, Germany |
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Abstract: | A new concept for a monolithic labchip platform to combine standard CMOS-integrated circuit technology and novel solid-state components is presented. The capability to perform laboratory analysis operations on small-scale labchip devices holds exceptional advantages compared to commonly used diagnostic instrumentation. The objective is to improve cost-efficiency, performance and functionality of chemical or biological systems on-a-chip by increasing the level of integration and miniaturization. The integration of hydrogenated amorphous silicon color sensors enables a novel combinatoric labchip-based chemical verification method in a specifically arranged microarray of capillaries and sensors. To test the labchip functionality, results about an electrophoretic separation as well as a pH-sensitive luminescent sensor complex are shown. |
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Keywords: | Labchip Monolithic integration Microfluidic a-Si:H sensors Electrophoretic separation |
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