| TiO2纳米晶的等离子体改性及光电转换性能的研究 |
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| 引用本文： | 韩俊波,于国萍,魏正和,王取泉,周正国. TiO2纳米晶的等离子体改性及光电转换性能的研究[J]. 光学与光电技术, 2005, 3(3): 36-38 |
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| 作者姓名： | 韩俊波 于国萍 魏正和 王取泉 周正国 |
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| 作者单位： | 1. 武汉大学物理系,武汉430072
2. 武汉大学物理系,武汉430072;武汉大学纳米科学与技术研究中心,武汉430072 |
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| 基金项目： | 湖北省自然科学基金(202130626)资助项目 |
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| 摘 要： | 用反应射频溅射法和涂敷法在导电玻璃上制备TiO2薄膜，并用Ar射频等离子体对TiO2薄膜进行处理。按“三明治”结构将TiO2工作电极、Pt／C对电极、0．5MKI 0．05M I2电解液组装成光电池，测量其开路电压和短路电流。结果表明经过Ar射频等离子处理后，溅射法和涂敷法制备的TiO2薄膜组装的光电池的光电流分别提高了约80％和60％。
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| 关 键 词： | 等离子体处理 射频溅射 光电转换 纳米晶TiO2 |
| 文章编号： | 1672-3392(2005)03-0036-03 |
| 收稿时间： | 2004-10-14 |
| 修稿时间： | 2004-10-14 |
Study on the Photoelectrical Property of TiO2 Thin Films by Ar Plasma Treatment |
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| HAN Jun-Bo,YU Guo-ping,WEI Zheng-he,Wang Qu-Quan,ZHOU Zheng-guo. Study on the Photoelectrical Property of TiO2 Thin Films by Ar Plasma Treatment[J]. optics&optoelectronic technology, 2005, 3(3): 36-38 |
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| Authors: | HAN Jun-Bo YU Guo-ping WEI Zheng-he Wang Qu-Quan ZHOU Zheng-guo |
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| Affiliation: | HAN Jun-bo1 YU Guo-ping1 WEI Zheng-he1 WANG Qu-quan1,2 ZHOU Zheng-guo1 |
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| Abstract: | Nanocrystal TiO2 films were prepared by reactive RF sputtering and coating method, respectively. The samples were treated by Ar radio frequency plasma. The cells in a “sandwich” structure were assembled with a TiO2 working electrode, Pt/C composite counter electrode and 0.5 M KI + 0.05 M I2 electrolyte. By Ar plasma treatment, the photo-currents of sputtered and coated TiO2 electrodes increased by 80% and 60%, respectively. |
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| Keywords: | plasma treatment radio frequency sputtering photo-electrical conversion nanocrystal TiO_2 films |
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