| Studies of Laser-induced-MOCVDZinc Oxide Films |
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| 作者姓名： | REN Peng-cheng TAN Zhong-ke and LUO Wen-xiu |
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| 作者单位： | Ceiiter for Functional Materials Research，Qingdao Institute of Chemical Technology，Qingdao，266042 |
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| 摘 要： | ＳｔｕｄｉｅｓｏｆＬａｓｅｒ－ｉｎｄｕｃｅｄ－ＭＯＣＶＤＺｉｎｃＯｘｉｄｅＦｉｌｍｓＲＥＮＰｅｎｇ－ｃｈｅｎｇ，ＴＡＮＺｈｏｎｇ－ｋｅａｎｄＬＵＯＷｅｎ－ｘｉｕ（ＣｅｉｉｔｅｒｆｏｒＦｕｎｃｔｉｏｎａｌＭａｔｅｒｉａｌｓＲｅｓｅａｒｃｈ，Ｑｉｎｇｄａ...
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Studies of Laser-induced-MOCVDZinc Oxide Films |
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| REN Peng-cheng,TAN Zhong-ke and LUO Wen-xiu.Studies of Laser-induced-MOCVDZinc Oxide Films[J].Chemical Research in Chinese University,1994(3). |
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| Authors: | REN Peng-cheng TAN Zhong-ke and LUO Wen-xiu |
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| Abstract: | hin films of ZnO were prepared using the double photobeams ultraviolet laserinduced-metallorganic chemical vapour deposition (MOCVD)technique. The struc-ture and transparent photoconductive properties of these films were investigated us-ing X-ray diffraction (XRD) , reflecting electron diffraction (RED) .scanning elec-tron microscopy (SEM) and ultraviolet visible absorption spectrometry (UV) .Theexperiments showed that the technique produced superior quality films of polycrys-tal ZnO_(1-x) (the O-vacancies in the ZnO lattice) , and possessed higher depositionrate, lower growth temperature conipared with CVD or MOCVD technique and thethin films had far better transparent photoconductive properties than tliose grownby the conventional CVD or MOCVD technique. |
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| Keywords: | Double-photobeams ultraviolet laser induction Metallorganic chemicalvapour tleposition(MOCVD) Zinc oxide film |
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