| 铁酸镧纳米晶薄膜制备及其在MOS场效应晶体管气敏元件上的应用 |
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| 引用本文： | 赵善麟,赵纯,才宏,徐宝琨,彭作岩,赵慕愚. 铁酸镧纳米晶薄膜制备及其在MOS场效应晶体管气敏元件上的应用[J]. 高等学校化学学报, 1993, 14(10): 1437 |
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| 作者姓名： | 赵善麟 赵纯 才宏 徐宝琨 彭作岩 赵慕愚 |
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| 作者单位： | 1. 吉林大学电子工程系, 长春 130023;2. 吉林大学化学系 |
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| 基金项目： | 高等学校博士学科点专项基金;集成光电子学国家重点联合实验室基金 |
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| 摘 要： | 纳米晶固体材料是由粒径小于100nm的微晶颗粒聚集而成的块状或薄膜人工固体,它具有特殊性能。本文采用sol-gel法制备了LaFeO_3纳米晶薄膜,并与集成电路平面工艺相结合,首次研制出了用纳米晶薄膜作为栅控制极的MOS场效应晶体管乙醇敏感元件。
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| 关 键 词： | 铁酸镧 溶胶-凝胶法 纳米晶薄膜 MOS场效应晶体管 气敏元件 |
| 收稿时间： | 1993-06-28 |
Preparation of LaFeO3 Nanocrystalline Thin Film and Application in the MOSFET Gas Sensor |
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| ZHAO Shan-Qi,ZHAO Chun,CAI Hong,XU Bao-Kun PENG Zuo-Yan,ZHAO Mu-Yu. Preparation of LaFeO3 Nanocrystalline Thin Film and Application in the MOSFET Gas Sensor[J]. Chemical Research In Chinese Universities, 1993, 14(10): 1437 |
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| Authors: | ZHAO Shan-Qi ZHAO Chun CAI Hong XU Bao-Kun PENG Zuo-Yan ZHAO Mu-Yu |
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| Affiliation: | 1. Electr.Eng.Dept., Jilin Univ., Changchun, 130023;2. Chem.Dept., JilinUniv. |
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| Abstract: | The precursors of LaFeO3 were prepared by sol-gel method and nanocrystalline film of the LaFeO3 were obtained by a solid phase reaction at about 550℃ for 1 hour.The thicknesses of the nanocrystalline films are uniformly distributed, and their crystal sizes are 40-50 nm.Combining this thin film technology with planar technique of integrated circuit, we have developed NCF-OSFETgas sensor for the first time.This device not only has good sensitivity to ethanol, but also has excellent selectivity. |
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| Keywords: | Lanthanum ferrite Sol-gel method Nanocrystalline thin film MOS field effect transistor Gas sensor |
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