电子散斑干涉三维变形测量技术研究

电子散斑干涉技术是一种非接触式,高精度的变形测量方法,适用于许多工业领域。由于其位移灵敏度与光学布置密切相关,因此难以在一次加载条件下实现三个方向的变形测量。针对这一问题,本文开发出一套能够同时测量面内和离面位移的测量装置。该装置采用波长为473nm、532nm和671nm的三种激光为光源,分别构建三组测量光路,使用一台3CCD彩色相机作为感光元件,一次记录三种光路获得的散斑干涉图像。通过对彩色相机的图像进行R、G、B通道分离,结合四步相移法可以同时获取物体的三维位移场。运用光纤技术优化光路设计,研制了集成化的电子散斑三维变形测量仪。通过相关的实验验证,评估了该装置测量物体三维变形的可行性和可靠性。

Research on simultaneous 3D displacement measurement using electronic speckle pattern interferometry

Electronic speckle pattern interferometry(ESPI)is a non-contact,high-precision deformation measurement method suitable for many industrial applications.Since the displacement sensitivity is closely related to the optical arrangement,it is difficult to simultaneously measure the three displacement components of an object in a single loading condition.To solve this problem,a practical device that can measure both in-plane and out-of-plane displacement components has been developed.The device uses three kinds of lasers with wavelengths 473nm,532nm and 671nm as the light sources to construct three sets of measuring optical paths,and uses a 3CCD color camera as the photosensitive element to record the speckle interference images from the three optical paths at a time.By performing R,G,B separation,the three-dimensional displacement field of the object can be simultaneously quantitatively determined with phase stepping.The optical fiber was used to optimize the optical path design,and an integrated electronic speckle pattern interferometer for 3D displacement measurement has been developed.The feasibility and reliability of the device to measure the three-dimensional deformation of the object were evaluated in the experiments.