Ag-Sn金属薄膜在升温过程中的结构变化

借助TEM和HVEM观察了碳膜上Ag-Sn薄膜在加热到640℃的过程中的结构变化。升温到200—250℃时,Ag和Sn迅速反应变为γ相Ag₃Sn。γ相在480℃以上迅速转变成具有片层状组织的β相。在510℃左右,β相薄膜开始产生缩聚。还用扫描电子显微镜观察了GaAs基底上Ag-sn膜加热后的表面形态。结果表明,若Sn含量(20—65Wt％)越多、合金温度越高,则合金膜表层缩聚越严重。 关键词：

THE STRUCTURAL CHANGES OF Ag-Sn BIMETALLIC FILMS DURING HEATING

The structural changes of Ag-Sn films on carbon film have been observed during heating to about 640℃ by using TEM and HVEM. Raising the temperature to 200-250℃, silver and tin react rapidly to form γ phase Ag₃Sn. Raising the temperature above 480℃, the γ phase transforms suddenly into laminar β phase. At about 510℃, the β phase film begins to agglomerate. The morphology of the Ag-Sn films on GaAs substrate after heating has been observed by using SEM. It is shown that when the tin content of Ag-Sn films (20-65wt%Sn) is greater and the alloying temperature is higher, the agglomeration of the film is more severe.