Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser |
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Authors: | Cheng Ya Sugioka Koji Midorikawa Katsumi Masuda Masashi Toyoda Koichi Kawachi Masako Shihoyama Kazuhiko |
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Affiliation: | RIKEN, The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, Japan. ycheng@postman.riken.go.jp |
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Abstract: | We show that three-dimensional micro-optical components can be embedded in a photosensitive glass by a femtosecond (fs) laser. After exposure to the tightly focused fs laser beam, latent images are written inside the sample. Modified regions are developed by a postbaking process and then preferentially etched away in a 10%-dilute solution of hydrofluoric acid. After this process, hollow internal structures are formed that act as a mirror and a beam splitter. Furthermore, we find that postannealing smoothes the surfaces of the fabricated hollow structures, resulting in great improvement of their optical properties. |
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