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电阻蒸发铝薄膜结构及其对非晶硅太阳电池性能的影响
引用本文:孙建,薛俊明,侯国付,王锐,张德坤,赵颖,耿新华. 电阻蒸发铝薄膜结构及其对非晶硅太阳电池性能的影响[J]. 人工晶体学报, 2007, 36(1): 152-156
作者姓名:孙建  薛俊明  侯国付  王锐  张德坤  赵颖  耿新华
作者单位:南开大学
基金项目:天津市科技发展基金;国家重点基础研究发展计划(973计划);天津市自然科学基金
摘    要:本文首先采用电阻蒸发法制备了不同厚度的Al薄膜,并选择了两个典型厚度的Al薄膜制备工艺来制备非晶硅太阳电池的Al背电极,研究了Al背电极厚度对电池性能的影响.结果表明,Al背电极的厚度由800nm减薄到70nm时,电池的Voc平均值由0.826V增加到0.829V,电池的Jsc平均值由11.747mA/cm2减小到11.318 mA/cm2,电池的FF平均值由0.701增加到0.728,而电池效率的平均值略有增加,由6.803;增加到6.833;.用扫描电镜(SEM)和X射线衍射(XRD)研究了玻璃衬底上蒸发的Al薄膜和非晶硅电池Al背电极表面形貌和微观结构的变化,分析了电池性能随Al背电极厚度变化的原因.

关 键 词:电阻蒸发  Al背电极  非晶硅太阳电池
文章编号:1000-985X(2007)01-0152-05
修稿时间:2006-09-14

Structural Characteristic of Thermal Evaporated Al Back-electrodes and Its Influence on the Performance of a-Si:H Solar Cells
SUN Jian,XUE Jun-ming,HOU Guo-fu,WANG Rui,ZHANG De-kun,ZHAO Ying,GENG Xin-hua. Structural Characteristic of Thermal Evaporated Al Back-electrodes and Its Influence on the Performance of a-Si:H Solar Cells[J]. Journal of Synthetic Crystals, 2007, 36(1): 152-156
Authors:SUN Jian  XUE Jun-ming  HOU Guo-fu  WANG Rui  ZHANG De-kun  ZHAO Ying  GENG Xin-hua
Affiliation:Institute of Photo-electronics Thin Film Devices and Technique of Nankai University, Tianjin 300071, China; Key Laboratory of Photo-electronic Thin Film Devices and Technique of Tianjin, Tianjin 300071, China; Key Laboratory of Optoelectronic Information Science and Technology, Ministry of Education,Tianjin, 300071, China
Abstract:In this paper,Al films with different thickness were prepared by thermal evaporation technique.The Influence of the Al back-electrodes on the performance of a-Si:H solar cells were studied.The results showed that,with the decreasing of Al thicknesses,Voc and FF increased,while Jsc decreased,and then the efficiencies increased from 6.803% to 6.833%.Scanning electron microscopy and X-ray diffraction techniques were used to identify the change in surface and microstructure of aluminum back electrodes.Finally,the dependence of a-Si:H solar cell performance on Al back electrode thickness and microstructure were analyzed in detail.
Keywords:thermal evaporation  aluminum back electrode  a-Si:H solar cell
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