Holographic imaging with a nanometer resolution using compact table-top EUV laser |
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Authors: | P W Wachulak M C Marconi R A Bartels C S Menoni and J J Rocca |
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Institution: | (1) Division of Mechanical & Aero System Engineering, Chonbuk National University, Jeonju 561-756, Republic of Korea |
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Abstract: | Holographic 2D/3D imaging with nanometer resolution using short wavelength extreme ultraviolet (EUV) light is presented in
this paper. Gabor’s holograms were recorded with a highly coherent table top EUV laser with different numerical apertures
demonstrating ultimately a spatial resolution of 46+/−2 nm, comparable with the illumination wavelength, in 2D holographic
imaging. Three dimensional images were obtained from a single high numerical aperture hologram recorded in a high resolution
photoresist and numerically reconstructed at different image planes, allowing numerical optical sectioning with a lateral
resolution ∼170 nm and depth resolution of 2.4 μm. The holograms were recorded in a high resolution photoresist and digitized
with an atomic force microscope. To assess the spatial resolution of the numerical reconstructions of the holograms a correlation
method was used. The algorithm allows for simultaneous estimation of the resolution and the feature size of the image under
analysis. |
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