Trace analysis of microcontaminations in compliance with ISO 9001: monitoring and diagnostics in large-scale silicon manufacturing

 Severing principles are reported concerning the certification of and quality assurance in a trace-analysis laboratory that handles a large number of real samples, about 60 000 analyses/year with 50 validated methods. ISO 9001 emphasizes monitoring rather than diagnostics. For monitoring purposes the trace-analysis methods must be highly selective and of high precision, with high throughput and uptime within a justifiable economic framework in the analytical range of interest. All trace-analysis methods must be cross-checked using independent analytical tools. The analytical laboratory must be fully integrated in the total quality management of the plant. The analyst must know not only the performance of the trace-analysis tools but also the materials and processes involved in manufacturing. Received: 19 October 1995 Accepted: 15 November 1995