Methods for preparation of transparent conductive diamond-like carbon films and mechanisms of conductivity formation

Technology for obtaining transparent conductive diamond-like carbon films has been developed. Conductivity of the films is ensured by doping with nitrogen during the growth process or by preliminary deposition onto the substrate of a catalyst of nanostructure growth. Optical methods of control of the process which allow varying both the transparency and conductivity of the obtained coatings are described. The mechanisms of formation of conductivity in a dielectric carbon matrix were investigated. It is shown that in the presence of catalysts the conductivity of films can be described using a percolation mechanism.