| Abstract: | A simple analytical model is presented making it possible to determine the amplitudes and phases of the rf field in the electrode
sheaths and quasineutral plasma of an rf discharge in the presence of electronneural collisions. The collisional case ω≪ν
is considered in detail. Measurements are also made of the electron temperature, plasma density, thickness of the electrode
sheaths, and rf field amplitude in the quasineutral plasma of an rf discharge in argon. The rf field amplitudes predicted
by this model are in satisfactory agreement with both our experimental data and the results of theoretical calculations of
other authors.
Kharkov State University, Kharkov. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, Vol. 41, No. 12, pp. 31–38,
December, 1998. |
