| 类金刚石薄膜的制备、特性及应用 |
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| 引用本文： | 李忠奇,姜杰,刘成赞,李正芬.类金刚石薄膜的制备、特性及应用[J].光学学报,1990,10(11):016-1021. |
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| 作者姓名： | 李忠奇 姜杰 刘成赞 李正芬 |
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| 作者单位： | 昆明物理研究所
(李忠奇，姜杰，刘成赞)，昆明物理研究所(李正芬) |
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| 摘 要： | 利用射频等离子分裂碳氢气体制备的类金刚石膜,具有硬度高、耐蚀和良好的透红外光等特性.本文研究了类金刚石膜的红外、机械、结构及电学特性,给出该膜应用于红外装置中镀膜元件的光谱性能.并结合文中所用的制备方法,讨论了类金刚石膜在低温低压下的形成机制.
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| 关 键 词： | 类金刚石薄膜 |
| 收稿时间： | 1989/10/4 |
Preparation, properties and application of Diamoni-Like Carbon Film |
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| LI ZHONGQI,JIANG JIE,LIU CHENZHAN AND LI ZHENFEN.Preparation, properties and application of Diamoni-Like Carbon Film[J].Acta Optica Sinica,1990,10(11):016-1021. |
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| Authors: | LI ZHONGQI JIANG JIE LIU CHENZHAN AND LI ZHENFEN |
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| Abstract: | The Diamond-Like Carbon (DLC) film, prepared with hydrocarbon gases decomposed by RF-plasma has the properties of high hardness, chemical inertness and IR transparence etc. In this paper, we study the properties of infrared, mechanical, structure and electricity of the DLC film. The spectral properties of coated element which being used in the infrared devices are presented, and the forming mechanism of the DIC film in low temperture and pressure is discussed. |
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| Keywords: | diamond-like thin film |
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