Fabrication of fluorinated polyimide optical waveguides by micropen direct writing technology |
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Authors: | Zemin WangYu Cao Xiangyou LiMing Gao Xiaoyan Zeng |
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Affiliation: | School of Optoelectronics Science and Technology, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China |
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Abstract: | A novel and cheap direct writing method based on the micropen has been developed to fabricate fluorinated polyimide stripe optical waveguides on Si/SiO2 wafers. The overall design, starting material, micropen direct writing system and fabrication processes of the stripe optical waveguides are presented. The effects of the key direct writing parameters, such as the tip-to-substrate distance, extrusive gas pressure, writing speed and viscosity of the polyamic acid, on the dimension and morphology of the stripe optical waveguides are discussed in detail. After deposition by the micropen system and baking process, the fluorinated polyimide stripe optical waveguides with good morphology and surface quality can be fabricated using the optimal parameters. The propagation losses at the wavelength of 1.55 μm are in the range of 1.4-3.5 dB cm−1 as characterized by different length combinations of the strip optical waveguides. |
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Keywords: | Micropen Direct writing system Optical waveguide Propagation loss |
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