Fabrication of fluorinated polyimide optical waveguides by micropen direct writing technology

A novel and cheap direct writing method based on the micropen has been developed to fabricate fluorinated polyimide stripe optical waveguides on Si/SiO₂ wafers. The overall design, starting material, micropen direct writing system and fabrication processes of the stripe optical waveguides are presented. The effects of the key direct writing parameters, such as the tip-to-substrate distance, extrusive gas pressure, writing speed and viscosity of the polyamic acid, on the dimension and morphology of the stripe optical waveguides are discussed in detail. After deposition by the micropen system and baking process, the fluorinated polyimide stripe optical waveguides with good morphology and surface quality can be fabricated using the optimal parameters. The propagation losses at the wavelength of 1.55 μm are in the range of 1.4-3.5 dB cm⁻¹ as characterized by different length combinations of the strip optical waveguides.