| 压电致动微喷的压力波特征分析 |
| |
| 引用本文： | 冯焱颖,周兆英,叶雄英,王国辉.压电致动微喷的压力波特征分析[J].微纳电子技术,2003(Z1). |
| |
| 作者姓名： | 冯焱颖 周兆英 叶雄英 王国辉 |
| |
| 作者单位： | 清华大学微米纳米中心微机械实验室 北京100084
(冯焱颖，周兆英，叶雄英)，清华大学微米纳米中心微机械实验室 北京100084(王国辉) |
| |
| 摘 要： | 提出了一种压电致动的阵列微喷 ,以面向吸入式药物治疗应用。该阵列微喷工作在器件的谐振点上 ,其工作性能决定于液体腔中的压力波的分布和大小。本文针对该类微喷建立了考虑压电 固 液耦合和压力波传播效应的等效模型 ,并利用有限元方法对整个器件的结构振动模态和压力驻波模态进行了分析。文章对不同振动模态下 ,液体腔中的声压力波分布以及对微喷设计的影响进行了讨论
|
| 关 键 词： | 压力波 固液耦合 微喷 MEMS |
Characterization of the pressure wave in piezoelectrically actuated micro jet |
| |
| FENG Yan ying,ZHOU Zhao ying,YE Xiong ying,WANG Guo hui.Characterization of the pressure wave in piezoelectrically actuated micro jet[J].Micronanoelectronic Technology,2003(Z1). |
| |
| Authors: | FENG Yan ying ZHOU Zhao ying YE Xiong ying WANG Guo hui |
| |
| Abstract: | A piezoelectrically actuated micro array jet has been developed for the application of the inhalation drug therapy. The micro jet is resonance dependent and its operational quality is determined by the characteristics of the pressure wave in the liquid chamber of the micro jet. In this paper, an equivalent model for the micro jet is presented and it considers the coupling effect of piezo structure liquid and the transmission of the pressure wave. Finite element method is used to solve the model for the structural vibration mode and the pressure stand wave mode. The characteristics of the pressure wave at different vibration modes and its effect on the design of micro jet is discussed. |
| |
| Keywords: | pressure wave structure liquid coupling micro jet MEMS |
| 本文献已被 CNKI 等数据库收录！ |
