| 周期多层膜Kirkpatrick-Baez显微镜成像性质分析 |
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| 引用本文： | 伊圣振,穆宝忠,王新,黄圣铃,朱京涛,王占山,丁永坤,缪文勇,董建军.周期多层膜Kirkpatrick-Baez显微镜成像性质分析[J].强激光与粒子束,2009,21(11). |
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| 作者姓名： | 伊圣振 穆宝忠 王新 黄圣铃 朱京涛 王占山 丁永坤 缪文勇 董建军 |
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| 作者单位： | 1． 同济大学 精密光学工程技术研究所， 上海 200092; 2. 中国工程物理研究院 激光聚变研究中心， 四川 绵阳 621900 |
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| 基金项目： | 国家高技术发展计划项目 |
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| 摘 要： | 分析了Kirkpatrick-Baez（KB）显微镜的成像性质与周期多层膜元件间的关系。基于分辨力和集光效率要求，设计了KB显微镜的光学结构，模拟了KB系统的成像质量，用W/B4C周期多层膜反射镜进行了X射线成像实验，在±100 μm视场内得到优于5 μm的空间分辨力结果。实验与模拟结果的对比表明，加工精度和球差是影响中心视场分辨力的关键因素，有效视场的大小受多层膜角度带宽的限制。
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| 关 键 词： | Kirkpatrick-Baez显微镜 X射线成像 周期多层膜 像质 |
| 收稿时间： | 1900-01-01; |
Imaging characteristic analysis of Kirkpatrick-Baez microscope with periodic multilayer |
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| Yi Shengzhen,Mu Baozhong,Wang Xin,Huang Shengling,Zhu Jingtao,Wang Zhanshan,Ding Yongkun,Miao wenyong,Dong jianjun.Imaging characteristic analysis of Kirkpatrick-Baez microscope with periodic multilayer[J].High Power Laser and Particle Beams,2009,21(11). |
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| Authors: | Yi Shengzhen Mu Baozhong Wang Xin Huang Shengling Zhu Jingtao Wang Zhanshan Ding Yongkun Miao wenyong Dong jianjun |
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| Institution: | 1. Institute of Precision Optical Engineering， Department of Physics，Tongji University， Shanghai 200092, China; 2. Research Center of Laser Fusion, CAEP, P.O. Box 919-988, Mianyang 621900, China |
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| Abstract: | Relation between imaging characteristic of Kirkpatrick-Baez(KB) microscope and periodic multilayer films is analyzed. The optical structure of KB microscope is designed based on resolution and collection efficiency requirements. Imaging quality is simulated, and 8 keV X-ray imaging experiment by KB microscope with W/B4C periodic multilayer is performed, the resolution is about 2 μm in central field and better than 5 μm in ±100 μm field. The result comparison between simulation and experiment shows spherical aberration and mirror machining precision are the key factors influencing the resolution of central field, and the range of effective field of view is limited by angle bandwidth of periodic multilayer. |
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| Keywords: | Kirkpatrick-Baez microscope X-ray imaging periodic multilayer imaging characteristic |
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