Spectral researches on interaction of laser radiation with targets from titanium oxides

Spectral characteristics and kinetic processes of the laser-induced plasma used for the growth of films from titanium oxides were investigated. The experiments were carried out in vacuum, oxygen, and an oxygen radiofrequency discharge plasma and its afterglow. A collision-radiative model describing the state-to-state kinetics of titanium atoms and ions at various stages of flight of laser-induced plasma was proposed. It was shown that the conditions of local thermodynamic equilibrium are disturbed because of a fast gas-dynamic expansion of plasma. Nonetheless, the distribution functions of titanium atoms and ions over excited states are described by the Boltzmann formulas with different temperatures.