Dissociation cross sections of silane and disilane by electron impact

The total dissociation cross sections for silane and disilane are reported for electron energies above their ionization thresholds up to 110 eV. The measurements are derived from a kinetic analysis of silane and disilane dissociation in a constant-flow multipole dc plasma reactor. The methane dissociation cross section was also measured and found in agreement with published data. Maxima for silane and disilane, occurring around 60 eV, are respectively (1.2±3)×10^?15 cm² and (2.6±0.6)× 10^?15 cm². Total ionization cross sections are also measured and above 50 eV the ratios of dissociative ionization to dissociation cross sections are 0.5±0.1 and 0.25±0.10 respectively for silane and disilane. The probability for silane elimination in the disilane fragmentation reaches a maximum of 0.8 at 19 eV and decreases down to 0.5 at 100 eV. Dissociation processes of silane and disilane are discussed in comparison with methane and ethane