Plasma-chemical reactions in weakly decomposed CCl4

For the case of weak feed gas decomposition, where the concentration of CCl₄ exceeds those of decomposition and built-up products, the emission of CCl* is shown to originate from dissociative excitation of CCl₄. With electron concentration measured independently, the kinetics of CCl₄ decomposition has been extracted from the time dependence of the CCl* intensity. Supported by EPR determinations of radical concentrations in rapidly flowing CCl₄ and CCl₄/O₂ afterglows, the primary decomposition reaction is shown to be the electron impact dissociation into CCl₃ and Cl. Its rate constant (k ₁=4×10^–8 cm³s^–1) indicates strongly that dissociative electron attachment is the main reaction channel at least at r.f. power densities just above the threshold of a self-maintaining discharge. At extremely low mean electron energies the emission of a continuum is observed, which is tentatively ascribed to the radiative CCl₃-Cl recombination.