Study of the influence of NH3 flow rates on the structure and photoluminescence of silicon-nitride films with silicon nanoparticles |
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| Affiliation: | 1. Instituto de Física, Universidad Nacional Autónoma de México, Ap. Postal 20-364, México, DF 01000, México;2. Universidad Autónoma de la Ciudad de México, Av. Providencia s/n, Col. San Lorenzo Tezonco, Delegación Iztapalapa, DF, México;3. Instituto de Investigaciones en Materiales, Universidad Nacional Autónoma de México. A.P. 70-360, Coyoacán 04510, DF, México;1. School of Power & Mechanical Engineering, Wuhan University, 430072 Wuhan, China;2. Accelerator Laboratory, Department of Physics, Wuhan University, 430072 Wuhan, China;3. Institute of Ion-Plasma and Laser Technologies, Academy of Sciences of Uzbekistan, 700135 Tashkent, Uzbekistan;1. Department of Child and Adolescent Psychiatry, School of Paediatrics and Child Health & School of Psychiatry and Clinical Neurosciences, Faculty of Medicine, Dentistry and Health Sciences, The University of Western Australia (M561), Perth, WA, Australia;2. Specialised Child and Adolescent Mental Health Services (CAMHS), Department of Health in Western Australia, Perth, WA, Australia;3. Community Child and Adolescent Mental Health Services, Department of Health in Western Australia, Perth, WA, Australia;4. Paediatric Consultation-Liaison Program, Child and Adolescent Mental Health Services, Department of Health in Western Australia, Perth, WA, Australia;5. Centre for Neonatal Research and Education, The University of Western Australia (M551), Perth, WA, Australia;6. The Perron Rotary Express Milk Bank, King Edward Memorial Hospital, Subiaco, WA, Australia;1. Physically Active Lifestyles Group (USQ-PALs), Institute for Resilient Regions, University of Southern Queensland, Education City, 37 Sinnathamby Boulevard, Springfield Central, QLD 4300 Australia;2. Active Living and Public Health Program, Institute of Sport, Exercise and Active Living (ISEAL), Victoria University, Ballarat Rd, Footscray VIC 3011, Australia;3. School of Health and Rehabilitation Sciences, The University of Queensland, St Lucia QLD 4072, Australia;4. Department of Kinesiology, Physical Activity, Sports and Health Research Group, KU Leuven- University of Leuven, Oude Markt 13, 3000 Leuven, Belgium;1. Department of Astronomy and Theoretical Physics, Lund University, SE 223-62 Lund, Sweden;2. Aix Marseille Université, Université de Toulon, CNRS, CPT, UMR 7332, 13288 Marseille, Cedex 09, France;3. Physics Department, Temple University, 1925 N, 12th Street, Philadelphia, PA 19122-1801, USA;1. Division of Urology, Duke Cancer Institute, Durham, NC;2. Department of Urology, Shiraz University of Medical Sciences, Shiraz, Iran;3. Urology Section, Department of Surgery, Veterans Affairs Medical Center, Durham, NC;4. Department of Urology, Oregon Health & Science University, Portland, OR;5. Department of Urology, University of California at Los Angeles Medical Center, Los Angeles, CA;6. Departments of Urology and Epidemiology & Biostatistics, University of California, San Francisco, CA;7. Department of Urology, University of California at San Diego Medical Center, San Diego, CA;8. Urology Section, Department of Surgery, Veterans Affairs Medical Centers and Division of Urologic Surgery, Department of Surgery, Medical College of Georgia, Augusta, GA;9. Division of Urology and Samuel Oschin Comprehensive Cancer Institute, Cedars-Sinai Medical Center, Los Angeles, CA |
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| Abstract: | Silicon-nitride films with silicon nanoparticles have been prepared at 300 °C by remote plasma-enhanced chemical vapor deposition using mixtures of H2, Ar and SiH2Cl2 and various NH3 flow rates. The films were characterized by means of Rutherford backscattering spectrometry, Fourier-transform infrared spectroscopy, single wavelength ellipsometry, high-resolution transmission electronic microscopy, atomic force microscopy and photoluminescence measurements. It was found a chemical stability as well as an increase in the photoluminescence signal for those films with the greatest amount of NH3. The increase in the photoluminescence signal is due to a quantum confinement effect produced by the nanoparticles, which were formed during the film's preparation process. |
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