梳齿式静电微驱动器的边缘效应影响分析

针对梳齿式静电微驱动器横向静电力的边缘效应问题,采用基于保角变换的修正公式和有限元法分别进行建模分析。采用修正公式虽然可以减小分析误差,但不能准确捕获边缘效应对驱动器驱动性能的动态影响过程,而有限元法能够准确捕获横向静电力受边缘效应影响而发生突变的过程。通过有限元法分析得出,驱动器的结构参数及其工艺误差均对横向静电力的边缘效应有影响,而驱动电压对边缘效应的影响可以忽略；当梳齿接近完全交叠时,边缘效应的影响显著,驱动器驱动性能具有明显的非线性特征。

Analysis of the Edge-Effect Influence on the Electrostatic Comb-Finger Micro-Actuator

For the edge effect problem of lateral electrostatic force in electrostatic comb-finger micro-actuators, the amended formulas based on the conformal mapping technique and the finite element methods were used to build and analyze models. The analysis errors could be reduced only by amended formulas, but could not get the dynamic effects on the driving performance of actuators. However, the process of the dynamic changes on the lateral electrostatic force of the electrostatic micro-actuator could be captured accurately by the finite element method. As the analysis results of the finite element method, the edge effect could be influenced by the parameters of the actuator structure and the fabrication errors, but the effects of the driving voltage could be neglected. When the combs were almost overlapped completely, the edge effect was obvious, and the driving performance of actuators was non-linear evidently.