碰撞效应对入射到射频偏压电极上离子能量分布和角度分布的影响

考虑了离子与中性粒子的弹性碰撞和电荷交换碰撞效应,建立了一套描述射频等离子体鞘层动力学特性的自洽模型,并利用MonteCarlo模拟方法研究了入射到电极上的离子的能量分布和角度分布.数值结果表明:随着放电气压增加,入射到电极上离子的能量分布逐渐地由双峰分布变成单峰分布,而且低能离子的数目也逐渐地增加.入射到电极上的离子呈小角分布,而且放电气压等参数对角度分布的影响不是太明显. 关键词： 射频放电 等离子体 离子 鞘层

Collisional effects on ion energy and angular distributions incident on RF-biased electrodes

Taking into account elastic collisions and charge-exchange collisions between ions and neutral particles, we established a self-consistent model describing the dynamics of radio-frequency (RF) sheath driven by a sinusoidal current source, and also, using the Monte-Carlo Method, simulated energy and angle distributions of ions bombarding on RF-biased substrates. It has been shown from numerical results that as increasing the discharge pressure, bimodal-peaks distributions for the ion energy become gradually a single-peak distribution, and low-energy ions increase. We also found that the angle distribution of ions is narrow and almost do not change with increasing the discharge pressure.