Structural and electrical properties of zinc oxides thin films prepared by thermal oxidation |
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Authors: | Mihaela Girtan G.G. Rusu Mihaela Rusu |
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Affiliation: | a Physics Department, Angers University, 2, Boulevard Lavoisier, 49045 Angers, France b Faculty of Physics, Al.I. Cuza University, Boulevard Carol I, No. 11, Iasi 700506, Romania |
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Abstract: | We report on zinc oxide (ZnO) thin films (d = 55-120 nm) prepared by thermal oxidation, at 623 K, of metallic zinc films, using a flash-heating method. Zinc films were deposited in vacuum by quasi-closed volume technique onto unheated glass substrates in two arrangements: horizontal and vertical positions relative to incident vapour. Depending on the preparation conditions, both quasi-amorphous and (0 0 2) textured polycrystalline ZnO films were obtained. The surface morphologies were characterized by atomic force microscopy and scanning electron microscopy. By in situ electrical measurements during two heating-cooling cycles up to a temperature of 673 K, an irreversible decrease of electrical conductivity of as flash-oxidized Zn films was revealed. The influence of deposition arrangement and oxidation conditions on the structural, morphological and electrical properties of the ZnO films is discussed. |
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Keywords: | 61.10.Nz 68.37.Ef 68.37.Ps 72.80.&minus r |
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