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KrF准分子激光空间相干性测量
引用本文:刘建胜,刘晶儒,魏燕明.KrF准分子激光空间相干性测量[J].光学学报,1999,19(8):094-1100.
作者姓名:刘建胜  刘晶儒  魏燕明
作者单位:西北核技术研究所,西安,710024
摘    要:设计制作了一套反转剪切干涉仪,测量了KrF准分子激光的空间相干性。用这种方法能够一次测量激光的空间相干度,并且在不同条纹相机的条件下能够实时测量相干度随时间的变化过程,在有注入、无注入锁定及百非稳腔中经过不同路程条件下对激光的空间相干性进行测量,并且和利用变换矩阵分析了相干度在非稳腔中的传播及其演变过程,计算了激光在不同往返次数的相干带宽度。

关 键 词:KrF准分子激光  反转剪切干涉仪  空间相干性  变换矩阵
收稿时间:1998/1/31

The Measurement of Spatial Coherence of KrF Excimer Laser
Liu Jiansheng,Liu Jingru,Wei Yanming.The Measurement of Spatial Coherence of KrF Excimer Laser[J].Acta Optica Sinica,1999,19(8):094-1100.
Authors:Liu Jiansheng  Liu Jingru  Wei Yanming
Abstract:A kind of reversalshear interferom eter has been designed to m easure the tem po ral change of spatial coherence of Kr F excim er laser w ith an unstable resonator. By thism ethod, w e can get the spatial coherence degree from a single m easurem ent. At differentshear distance, using slit and photodetector. The stepw ise increase of the spatial coherencedegree at intervals equal to the transit tim e of the resonator w as observed. Moreover, theray m atrix has been used to analyze the propagation of partial coherent light and the coher ence w idths of successive passes are calculated.
Keywords:Kr F excim er laser    reversal shear interferom eter    spatial coherence    raym atrix    
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