| 真空紫外到深紫外波段基底材料的光学特性 |
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| 引用本文： | 薛春荣, 易葵, 魏朝阳, 等. 真空紫外到深紫外波段基底材料的光学特性[J]. 强激光与粒子束, 2009, 21(02). |
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| 作者姓名： | 薛春荣 易葵 魏朝阳 邵建达 范正修 |
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| 作者单位： | 1.常熟理工学院 江苏新型功能材料实验室, 江苏 常熟 21 5500;;;2.中国科学院 上海光学精密机械研究所, 上海 201 800;;;3.中国科学技术大学 国家同步辐射实验室, 合肥 230029 |
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| 摘 要： | 研究了真空紫外到深紫外波段常用的基底材料，给出了常用基底材料的光学特性和在真空紫外波段的截止波长，测量了这些材料在120~500 nm的透过率，给出了通过透过率计算弱吸收基底光学常数的计算方法，并用该方法得到了熔石英、氟化镁晶体、氟化钙晶体、氟化锂晶体在120~500 nm的折射率和消光系数，对这些常用基底的使用范围和特点进行了一定的比较和分析，并将所得基底的光学常数与公开发表的文献进行了比较，证明了所得结果的可靠性。
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| 关 键 词： | 深紫外 真空紫外 弱吸收基底 透过率 消光系数 |
Optical properties of vacuum ultraviolet and deep ultraviolet region substrate materials |
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| xue chunrong, yi kui, wei chaoyang, et al. Optical properties of vacuum ultraviolet and deep ultraviolet region substrate materials[J]. High Power Laser and Particle Beams, 2009, 21. |
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| Authors: | xue chunrong yi kui wei chaoyang shao jianda fan zhengxiu |
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| Affiliation: | 1. Jiangsu Laboratory of Advanced Functional Materials,Changshu Institute of Technology,Changshu 215500,China;;;2. Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;;;3. National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,China |
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| Abstract: | To furnish a greater choice of substrate materials for application in vacuum ultraviolet and deep ultraviolet region, the optical properties of several substrate materials such as JGS1, MgF2, CaF2, and LiF are studied in the wavelength region from 120 nm to 300 nm. The optical constants of these materials are determined from photometric measurements through a process of matching calculated and measured values of the reflectance and transmittance in the ultraviolet to deep ultraviolet region. A method to calculate optical properties of weak absorption substrates is introduced. |
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| Keywords: | deep ultraviolet vacuum ultraviolet weak absorption substrates transmittance exitnction coefficient |
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