高功率TEA CO2激光器气体循环系统的设计

阐述了气体循环系统对高功率TEA CO2激光器的重要作用，分析了系统参数、结构组成及其设计。以体积流量法确定放电区气体流速，采用对称式的结构布局，选用轴流压气机和板翅式热交换器，加入系统附加阻力以确定风机静压参数。研究出的气体循环系统，放电区气体平均流速84.8 m/s，流速不均匀度纵向4.2%、横向0.38%；光学支架振动加速度4×10-2 m/s2，振动位移2.6×10-7 m。在放电体积2.5×10-3 m3、单脉冲注入能量276 J、放电脉宽150 ns条件下，实现了重复频率400 Hz均匀稳定的持续辉光放电，输出了高平均功率激光。

Design of gas circulation system in high power TEA CO2 laser

The gas circulation system in TEA CO2 laser is very important. The parameters, the structure and the design of the system are analyzed. A symmetric structure is adopted and an axial blower and a plate-fin heat exchanger are selected. Using volume flux method, the gas velocity in the discharge zone is determined. The static pressure parameters of the fan are determined, taking into account of the additional resistance.The gas circulation system has an average gas velocity of 84.8 m/s, with inhomogeneity 4.2% longitudinally and 0.38% horizontally respectively. Under the condition of a discharge volume of 2.5×10-3 m3, a single pulse injection energy of 276 J, and a discharge pulse width at 150 ns, the system successfully achieves an even and steady glow discharge at a repetition rate of 400