钙钛矿结构氧化物薄膜 的外延生长

在成功地外延生长超导、铁电、铁磁等多种性质的钙钛矿结构氧化物薄膜的基础上，讨论影响氧化物薄膜 外延生长的一些因素.考虑到相形成和薄膜长征动力学，在利用脉冲激光淀积法外延生长氧化物薄膜中衬底温度是十分重要的工艺参数.衬底温度对成相和生长薄膜的取向都有影响.考虑到薄膜是首先在衬底表面成核、成相并生长.因此衬底材料晶格的影响是不容忽视的.观察到衬底材料对薄膜外延生长温度的影响.在适当的工艺条件下，利用低温三步法工艺制备得到有很强织构的外延薄膜.这突出表明界面层的相互作用对钙钛矿结构薄膜的取向有着相当大的影响. 关键词：

EPITAXIAL GROWTH OF PEROVSKITE OXIDE THIN FILMS

Based on the ahievement of epitaxial growth in several Perovskite oxide films,we discuss the importance of substrate temperature (T_s) and substrate material in the epitaxial growth of per-ovskite oxide thin films.Influences of T_s on growth orientation and epitaxial threshold temperature were observed.The results indicate that during the growth of the oxide films the phase formation and growth dynamics should be taken into considera tion.The threshold temperature for epitaxial growth depends on the substrate materials.This demonstrates the influence of substrate material on the initial nucleation and epitaxial growth.