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Combinatorial synthesis of thin mixed oxide films and automated study of their piezoelectric properties |
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| Authors: | Daniela Rende Kerstin Schwarz Ute Rabe Wilhelm F. Maier Walter Arnold |
| Affiliation: | aUniversität des Saarlandes, Lehrstuhl für Technische Chemie, Geb. C4 2, D-66123 Saarbrücken, Germany bFraunhofer Institut für Zerstörungsfreie Prüfverfahren, Universität des Saarlandes, Geb. 37, D-66123 Saarbrücken, Germany |
| Abstract: | The development of an automated production of thin films and the characterization of their piezoelectric properties in high-throughput are described. A library of 50 undoped as well as doped lead zirconate titanate Pb(Zr,Ti)O3 (PZT) coatings was produced by sol deposition. Afterwards, the piezoelectric properties of the library films were analyzed by automated atomic force microscopy employing the ultrasonic piezo-mode. |
| Keywords: | PZT Combinatorial chemistry High-throughput Sol–gel synthesis AFM |
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