Manufacturing technology for the fabrication a discrete actuator
using a magnetic shape memory alloy |
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Authors: | B Spasova M C Wurz H H Gatzen |
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Institution: | (1) Institute for Microtechnology (imt), Center for Production Technology, Leibniz Universitaet Hannover, An der Universitaet 2, 30823 Garbsen, Germany |
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Abstract: | To demonstrate the feasibility of combining thin-film fabrication techniques and discrete MSM stripes, a hybrid actuator system
was designed. The actuator system consists of four thin-film stators and two discrete MSM stripes mounted in a row. For creating
an actuator motion, one of the MSM stripes has to be excited by a pair of stators to cause variant switching. This results
in an elongation plus a compression of the second stripe and vice versa. The technologies required for fabricating the thin-film
stator are sputter deposition, PECVD, electroplating, etching, and photolithography. This paper describes the fabrication
process for a thin-film stator used for the MSM micro actuator system. It also presents technology study results indicating
the feasibility of the planned fabrication sequence. |
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Keywords: | |
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