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128 channels of integrated filter array rapidly fabricated by using the combinatorial deposition technique |
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| Authors: | S.-W. Wang M. Li C.-S. Xia H.-Q. Wang X.-S. Chen W. Lu |
| Affiliation: | (1) National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, 200083, P.R. China;(2) Hefei National Laboratory for Physical Science at Microscale, and USTC-Shincron Joint Laboratory, University of Science and Technology of China, Hefei, 230026, P.R. China |
| Abstract: | A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique in a nine-step deposition process. The pass bands of the filters distribute almost linearly in the range of 722.0∼880.0 nm. The relative bandwidth of the pass bands is smaller than 0.44%. Such a NBPF array can be utilized as a wavelength division component in many optical applications. It is very powerful for the miniaturization of relevant apparatuses. PACS 42.79.Ci; 84.30.Vn; 42.82.Cr; 42.82.Gw |
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