Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy |
| |
| Authors: | Lan-Xiang SUN Wei WANG Xue-Yong TIAN Peng ZHANG Li-Feng QI Li-Ming ZHENG |
| |
| Institution: | 1. Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China;2. Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China;3. Key Laboratory of Networked Control System, Chinese Academy of Sciences, Shenyang 110016, China;4. University of Chinese Academy of Sciences, Beijing 100049, China;5. Central Research Institute, SIASUN Robot and Automation Co. Ltd, Shenyang 110168, China |
| |
| Abstract: | The technique of micro-laser-induced breakdown spectroscopy (μLIBS) usually refers to analyzing the surface of the sample using a compact focused laser beam in the optical microscope range. Compared to conventional laser-induced breakdown spectroscopy (LIBS), it can provide more abundant form, structure, and content information on a smaller, less sample condition. Hence, the application field is very wide. In this paper, the basic status of μLIBS in the selection of laser source and the structure of optical path system is introduced, and its application in metal, semiconductor, animal and plant fields is reviewed. The existing problems and potential development direction is pointed out. |
| |
| Keywords: | Laser-induced breakdown spectroscopy Microanalysis Ablation crater Segregation Review |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
