用电泳法制备ZnxMg1-xO薄膜及其特性研究

用电泳法制备了一系列ZnxMg1-xO薄膜. 对ZnxMg1-xO薄膜的光致发光研究表明，在薄膜发射谱的紫外区域有两个显著的峰，分别对应自由激子和激子间碰撞的发光. 在可见光区域，发射谱的强度基本保持恒定，没有发现通常报道的绿光发射，说明生长的薄膜中氧与其他元素保持很好的 化学配比，抑制了基于氧空位的绿带发射机理. 另一方面，薄膜成分中Mg含量的变化和退火 温度的变化对薄膜的发射谱有显著的影响，表现在ZnxMg1-xO的紫 外发射峰随Mg含量的增加向短波方向移动，同时峰强度随退火温度的升高显著增加. 关键词： 发射谱 x射线衍射 电泳法 ZnMgO薄膜

Characteristics of the ZnxMg1-xO fil ms grown by electrophoresis method

A series of ZnxMg1-xO films are prepared with electro phoresis deposition. The x-ray diffraction of the film is consistent with that of the multicrystal ZnO, it shows the structure of the ZnxMg1-xO film agree with the polycrystal of ZnO. The photoluminescence study of the ZnxMg1-xO film shows that there are two promine nt peaks in the ultraviolet region of the emission spectra, corresponding to the light emission of free and bound excitons, respectively. The intensity of the emi ssion spectra is invariable in the visible region, and no new peaks including the green band exist. This phenomenon indicates that the oxygen in the film keeps a fine stoichiometry with other elements, and restrains the emission of the green band based on the oxygen vacancies. On the other hand, the blue shift of the UV peaks in the photoluminescence spectra is found to be associated with increasing Mg content in ZnxMg1-xO films, and the intensity of peaks is also reinforced significantly with increasing annealing temperature.