Improved dielectric and electrical properties of (Ba,Sr)TiO3 thin films using Pt/LaNiO3 as the top-electrode material |
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Authors: | YH Gao JL Sun JH Ma XJ Meng JH Chu |
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Institution: | (1) National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, 200083, P.R. China |
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Abstract: | (Ba,Sr)TiO3 (BST) capacitors grown on a LaNiO3 (LNO) bottom electrode, with Pt (80 nm), LNO (100 nm), and double-layer Pt/LNO (80/10 nm) top electrodes have been investigated.
It was found that the dielectric behavior is improved by a decrease of the electrical properties for the BST capacitor using
double-layer Pt/LNO top electrodes. The dielectric constant of 100 nm-thick BST films with a Pt electrode was only 165 at
100 kHz, while that with a double-layer electrode was about 242. Correspondingly, the tunability was greatly improved from
26% to 41% with an electric field of 600 kV/cm. These have been attributed to increased interfacial capacitance density, which
resulted from an improved interface, between the films and the top electrode. The dielectric loss was also reduced by using
a double-layer electrode. Furthermore, the leakage current of a capacitor with a double-layer Pt/LNO electrode was one order
of magnitude lower than that with a single LNO electrode. It can be explained by the fact that the weak chemical interaction
between LNO (10 nm) and BST causes a high potential barrier at the interface.
PACS 81.15.-z; 81.15.Cd; 77.55.+f; 77.84.Dy; 77.22.-d |
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