| Ni/a-Si多层膜中固相非晶化反应过程 |
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| 引用本文： | 汪卫华,白海洋,王文魁.Ni/a-Si多层膜中固相非晶化反应过程[J].物理学报,1998,47(7):1149-1154. |
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| 作者姓名： | 汪卫华 白海洋 王文魁 |
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| 作者单位： | (1)中国科学院低温实验技术中心，北京 100080; (2)中国科学院物理研究所，北京 100080 |
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| 摘 要： | 采用原位X射线衍射法定量地分析研究了多晶Ni/非晶Si成分调制膜中的固相反应非晶化过程.提出了非晶Ni-Si相在Ni/a-Si多层膜固相非晶化反应中的生长模型.并对Ni晶界上的非晶化现象给予热力学和动力学上的解释.
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| 关 键 词： | 薄膜 固相非晶化 多层膜 非晶硅 镍／硅 |
| 收稿时间： | 1997-09-22 |
AMORPHIZATION REACTION PROCESS IN Ni/AMORPHOUS Si MULTILAYER |
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| WANG WEI-HUA,BAI HAI-YANG and WANG WEN-KUI.AMORPHIZATION REACTION PROCESS IN Ni/AMORPHOUS Si MULTILAYER[J].Acta Physica Sinica,1998,47(7):1149-1154. |
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| Authors: | WANG WEI-HUA BAI HAI-YANG and WANG WEN-KUI |
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| Abstract: | Solid state amorphization reaction process in Ni/amorphous Si multilayers has been quanlitatively studied by using in situ X-ray diffraction. An amorphous formation and growth model is suggested for elucidating the solid state reaction in the Ni/amorphous Si multilayers. Thermodynamic and kinetic interpretations for the amorphization reaction at grain boundaries in Ni sublayers are presented. |
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