| 微马达转子电镀导磁层的研究 |
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| 引用本文： | 丁桂甫,张寿柏.微马达转子电镀导磁层的研究[J].微细加工技术,1996(3):71-76. |
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| 作者姓名： | 丁桂甫 张寿柏 |
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| 作者单位： | 上海交通大学信息存储研究中心 |
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| 摘 要： | 本文推荐一种镀液，用于制作电磁型微电机转子坡莫合金导磁层，研究了该镀液的组成和工作条件对镀层成份和内应力的影响，表明该镀液具有可供选用的电流密度范围宽，允许较高Ｆｅ２－浓度和镀层内应力低等优点。
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| 关 键 词： | 微电机 导磁层 坡莫合金 电镀液 |
A STUDY ON PLATING SOFT MAGNETIC UNDERLAYER FOR THE ROTOR OF MICROMOTOR |
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| Ding Guifu, Zhang Shoubai, Li Yiqun, Xu Dong, Shen Tanhul.A STUDY ON PLATING SOFT MAGNETIC UNDERLAYER FOR THE ROTOR OF MICROMOTOR[J].Microfabrication Technology,1996(3):71-76. |
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| Authors: | Ding Guifu Zhang Shoubai Li Yiqun Xu Dong Shen Tanhul |
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| Institution: | Information Storage Research Center of Shanghai Jiaotong University Shanghai 200030 |
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| Abstract: | In this paper, a solution suitable for mask plating to manufacture the permalloy layer was developed. The layer was used as the soft magnetic.underlayer for rotor of magnetoelectrical micromotor, The influence of the solution components and operation conditions on composition and internal stress of theplating layer was also investigated. It is shown that this solution has advantages, such as wide applicable range of current denaity, high Fe2 concentration, and low internal stress of plating layer. |
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| Keywords: | micromotor soft magnetic underlayer permalloy plating solution |
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